Thermal Radiation Microsensor


A thermal radiation microsensor comprising thermoelectric micro pillars, in which multiple vertically standing thermoelectric micro pillars acting as thermoelectric pairs and mechanical support of an absorption layer. Radiation absorbed by the absorption layer can produce a temperature difference driving the thermocouple comprising p-type and n-type micro pillars to output a voltage. Multiple thermocouples can be connected in series to improve the signal output.

  • Thermal Radiation Microsensor
Commercialisation opportunities
Technology licensing agreement
Problem addressed

Good potential performance with high responsivity, short response time and miniaturized dimension

  • Extendable for other applications such as visible light detection and chemical sensing
Key impact
  • IC/MEMS-style fabrication process allowing for mass and low-cost production
  • Applications in infra-red radiation such as thermopiles, bolometers, pyroelectric sensors


  • US Patent No. US9978926B2
The Hong Kong University of Science and Technology (HKUST)

The Hong Kong University of Science and Technology (HKUST) ( is a world-class research intensive university that focuses on science, technology and business as well as humanities and social science. HKUST offers an international campus, and a holistic and interdisciplinary pedagogy to nurture well-rounded graduates with global vision, a strong entrepreneurial spirit and innovative thinking. Over 80% of our research work were rated “Internationally excellent” or “world leading” in the Research Assessment Exercise 2020 of Hong Kong’s University Grants Committee. We were ranked 3rd in Times Higher Education’s Young University Rankings 2022, and our graduates were ranked 23rd worldwide and among the best from universities from Asia in Global University Employability Survey 2021.