A thermal radiation microsensor comprising thermoelectric micro pillars, in which multiple vertically standing thermoelectric micro pillars acting as thermoelectric pairs and mechanical support of an absorption layer. Radiation absorbed by the absorption layer can produce a temperature difference driving the thermocouple comprising p-type and n-type micro pillars to output a voltage. Multiple thermocouples can be connected in series to improve the signal output.
Good potential performance with high responsivity, short response time and miniaturized dimension
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