We have developed a low-cost portable optical precision profilometer (POPP) with a compact size of around 30 cm x 20 cm x 10 cm. The system is based on a novel common-path quantitative phase microscopy method, which allows to achieve < 1 nm measurement precision and < 10 ms measuremnt time.
In recent years, advanced manufacturing and chip fabrication geatly demand for high precision, low-cost and integratable inspection tools. However, there is a large market shortage of such tools. Therefore, we developed portable optical precision profilometer (POPP) and demonstrated its applications for material metrology and chip inspection.
Founded in 1963, The Chinese University of Hong Kong (CUHK) is a forward-looking comprehensive research university with a global vision and a mission to combine tradition with modernity, and to bring together China and the West. CUHK teachers and students hail from all around the world. Four Nobel laureates are associated with the university, and it is the only tertiary institution in Hong Kong with recipients of the Nobel Prize, Turing Award, Fields Medal and Veblen Prize sitting as faculty in residence. CUHK graduates are connected worldwide through an extensive alumni network. CUHK undertakes a wide range of research programmes in many subject areas, and strives to provide scope for all academic staff to undertake consultancy and collaborative projects with industry.